SPC/FDC Integration Demo - Semiconductor Process Optimization

System Ready

Process Module

Monitoring Parameters

Control Chart Type

Alert Thresholds

Sample Size

In Control

Process Status

1.67

Cpk

Active Alerts

99.2%

System Uptime

Temperature Drift Detected

Temperature trending outside 2σ control limits

2 minutes ago

Process Optimization

Cpk improved from 1.45 to 1.67

15 minutes ago

Critical Dimension Out of Spec

CD measurement exceeds 3σ control limits

1 hour ago