Comprehensive modeling and simulation suite for semiconductor planarization processes
This comprehensive suite explores Chemical Mechanical Polishing through interactive simulations, professional tools, and detailed documentation. Covering Preston equation, contact mechanics, tribochemical models, and ML approaches for oxide, copper, and tungsten CMP across molecular to wafer scales.
Interactive Preston model with pressure/velocity sweeps, material comparison, and MRR prediction
Explore Demo →Greenwood-Williamson asperity contact with pad deformation and pressure distribution
Explore Demo →CFD simulation of slurry distribution, particle transport, and concentration profiles
Explore Demo →Wear-corrosion mechanisms for metal CMP with oxidation kinetics and pH effects
Explore Demo →Feature-scale simulation showing step height evolution and dishing/erosion
Explore Demo →Pad wear modeling with diamond conditioning and asperity regeneration
Explore Demo →Heat generation from friction, slurry temperature, and thermal expansion
Explore Demo →DEM simulation of particle-wafer interactions with indentation mechanics
Explore Demo →Motor current, optical, and acoustic monitoring for real-time process control
Explore Demo →Side-by-side comparison of oxide, copper, tungsten, and aluminum CMP
Explore Demo →Non-uniformity analysis with center-edge variation and retaining ring effects
Explore Demo →Atomic-scale material removal mechanisms with bond breaking visualization
Explore Demo →Multi-objective optimization for MRR, uniformity, and selectivity targets
Open Tool →Automated recipe generation from material stack and performance requirements
Open Tool →Statistical analysis tool for DOE results with Preston coefficient extraction
Open Tool →Neural network and physics-informed ML models for MRR prediction
Open Tool →Comprehensive CoO analysis including consumables, downtime, and throughput
Open Tool →Diagnostic tool for scratches, dishing, erosion, and particle contamination
Open Tool →Comprehensive theory covering Preston, contact mechanics, tribochemistry, and multiscale models
Read Guide →Complete programming interface for CMP models and simulation functions
View API →Hands-on tutorials for setting up simulations and analyzing results
Start Learning →Ready-to-use implementation examples in Python, MATLAB, and JavaScript
Browse Examples →