CVD Film Property Analyzer

Overview

Supported Characterization Methods

This tool analyzes data from multiple thin film characterization techniques to extract optical constants, physical properties, and composition profiles with high precision.

Ellipsometry

Refractive index (n), extinction (k), thickness

XRR

Density, roughness, layer structure

XRD

Texture, grain size, phase composition

SIMS

Depth profiles, dopant concentration

Ellipsometry Analysis

Data Input

Format: CSV with columns: Wavelength(nm), Psi(deg), Delta(deg)

Example: 400, 25.3, 165.2

Drop CSV file or click to upload

Ellipsometry Ψ-Δ data

Or paste data directly:

Model Parameters

Substrate Material

Film Material Model

Initial Thickness (nm)

Angle of Incidence (deg)

X-Ray Reflectivity (XRR) Analysis

Data Input

Format: CSV with columns: 2Theta(deg), Intensity(counts)

Example: 0.5, 1.2e6

Drop CSV file or click to upload

XRR reflectivity curve

Or paste data directly:

Fitting Parameters

X-ray Wavelength (Å) Cu Kα = 1.5406 Å

Initial Density (g/cm³)

Initial Thickness (nm)

Initial Roughness (nm)

X-Ray Diffraction (XRD) Analysis

Data Input

Format: CSV with columns: 2Theta(deg), Intensity(counts)

Example: 20.0, 150

Drop CSV file or click to upload

XRD diffraction pattern

Or paste data directly:

Analysis Parameters

X-ray Wavelength (Å)

Material System

Peak Finding Threshold

Background Polynomial Order

SIMS Depth Profile Analysis

Data Input

Format: CSV with columns: Depth(nm), Concentration(atoms/cm³) or multiple species

Example: 10, 1.5e20, 3.2e18 (for 2 species)

Drop CSV file or click to upload

SIMS depth profile

Or paste data directly:

Analysis Parameters

Number of Species

Species 1 Name

Species 2 Name

Interface Detection Threshold

Film Property Analyzer

Overview

Supported Characterization Methods

Ellipsometry

XRR

XRD

SIMS

Ellipsometry Analysis

Data Input

Drop CSV file or click to upload

Model Parameters

X-Ray Reflectivity (XRR) Analysis

Data Input

Drop CSV file or click to upload

Fitting Parameters

X-Ray Diffraction (XRD) Analysis

Data Input

Drop CSV file or click to upload

Analysis Parameters

SIMS Depth Profile Analysis

Data Input

Drop CSV file or click to upload

Analysis Parameters

Analysis Results

Data Visualizations

Raw Data

Model Fit

Residuals

Optical Constants (n, k)

Statistical Analysis

Confidence Intervals

Correlation Matrix