Thickness Uniformity Tool

49-zone wafer mapping, showerhead optimization, edge exclusion analysis, gas flow simulation, and temperature distribution modeling

Uniformity Metrics

Non-Uniformity Definitions

1σ (Standard Deviation): σ/μ × 100%

3σ (Three Sigma): 3σ/μ × 100%

Range: (Max - Min) / (2 × Mean) × 100%

Radial Uniformity: Variation from center to edge

Industry Specifications

  • Research/Development: σ/μ < 5%
  • Production (mature): σ/μ < 2%
  • Advanced nodes: σ/μ < 1%
  • Edge exclusion typically: 3-10 mm

Wafer Configuration

Thickness Data Input

Format: CSV with columns: Zone, X(mm), Y(mm), Thickness(nm)

Or: Just thickness values (one per line) for standard 49-zone pattern

Drop CSV file or click to upload

Showerhead Optimization

Optimize gas showerhead parameters to minimize thickness non-uniformity

Visualizations

2D Wafer Map

3D Thickness Profile

Radial Profile

Thickness Distribution

Normalized Deviation

3-Sigma Control Chart

Gas Flow Simulation