CD-SEM Analysis Tool

Critical Dimension Scanning Electron Microscopy - Edge Detection & Roughness Analysis

Nominal CD (nm): 50

CD Variation (nm): 2.0

LER Amplitude (nm): 1.5

Correlation Length ξ (nm): 30

Roughness Exponent α: 0.7

Measurement Points: 100

Spec Tolerance (nm): 5.0

Repeatability Runs: 10

50.0

Mean CD (nm)

2.0

σ CD (nm)

4.5

LER 3σ (nm)

6.4

LWR 3σ (nm)

1.67

Cpk

0.15

Repeatability (nm)

3D Rough Edge Surface Reconstruction

SEM Image with Edge Detection

Line Scan Intensity Profile (dI/dx)

Edge Position Trace

LER Distribution Histogram

Power Spectral Density (PSD)

CD Distribution with Cpk

Measurement Repeatability