Defect Inspection & Classification

Pattern Recognition & Yield Analysis

95%
POD @40nm
12.5
Signal-to-Noise
2.5%
False Positive Rate
25 nm
Critical Size
Key Physics Equations:
SNR = (I_defect - I_background) / σ_noise
POD = 1 - exp(-(size/threshold)^k)
False Positive Rate = nuisance / total
Contrast = (I_max - I_min) / (I_max + I_min)
Classification confidence = P(class|features)

Inspection Parameters

Defect Size (nm)60
Defect Contrast (%)25
Background Noise (%)5
Detection Threshold0.5
Wavelength (nm)400
Pixel Resolution (nm)50
Classification Confidence (%)85
Critical Size (nm)40

1. Defect Size Distribution

2. Probability of Detection (POD) Curve

3. Wafer Defect Map

4. Defect Classification

5. Signal-to-Noise Distribution

6. ROC Curve

7. Defect Pareto Chart

3D Defect Distribution