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Mask Data Prep Tool
VSB Shot Optimization, Proximity Correction & MRC Analysis
Pattern Complexity:
50
Min Feature (nm):
100
Base Dose (μC/cm²):
5.0
Backscatter η:
0.7
Forward Scatter σ (nm):
20
Shot Overlap (%):
25
Acute Angle Threshold (°):
30
Grid Density:
20
2450
Total Shots
5.0
Mean Dose (μC/cm²)
7.5
Max Dose (μC/cm²)
3
MRC Violations
3.5
Write Time (hrs)
3D Dose Height Map
GDS Layout View
Fracture Result with Shots
Shot Count Histogram
Dose Map Heatmap
Proximity Correction Profile
Write Time vs Shot Count
MRC Violations Map
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