Metrology Tool Comparison

CD-SEM, Scatterometry & AFM Cross-Correlation Analysis

Reference CD (nm): 50

SEM Precision σ (nm): 0.5

Scatt. Precision σ (nm): 0.8

AFM Precision σ (nm): 0.3

SEM Bias (nm): 0.5

Scatt. Bias (nm): -0.8

AFM Bias (nm): 0.2

Number of Sites: 50

0.92

r (SEM-Scatt)

0.95

r (SEM-AFM)

0.88

r (Scatt-AFM)

0.5

Mean Bias (nm)

1.2

TMU (nm)

3D Three-Tool Scatter Plot

SEM vs Scatterometry

SEM vs AFM

Scatterometry vs AFM

Bland-Altman Plot (SEM-Scatt)

Residuals Analysis

TMU Budget Breakdown

Correlation Matrix