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OPC Simulation
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Optical Proximity Correction
Model-based OPC, SRAF placement, edge placement error minimization
2.1 nm
Edge Placement Error
12
SRAF Count
8
OPC Iterations
8.5 nm
Max Correction
OPC Parameters
OPC Aggressiveness
0.3
0.7
SRAF Size (nm)
20
40
SRAF Spacing (nm)
40
70
Bias Correction (nm)
-10
0
Corner Rounding
0
8
Hammerhead Length
0
20
Iterations
1
8
EPE Threshold (nm)
1
2
EPE = |CD_target - CD_printed|
OPC Correction: Δx(n+1) = Δx(n) + α·EPE(n)
SRAF Placement: optimize NILS while keeping transmission < 10%
Original vs OPC Mask
EPE Convergence
SRAF Distribution
CD Error Map
Correction Magnitude
OPC Impact on NILS
Edge Fragments