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Overlay Error Budget Tool
RSS Error Decomposition & APC Analysis
Wafer Error σ (nm):
3.0
Alignment Error σ (nm):
2.5
Process Error σ (nm):
2.0
Random Error σ (nm):
1.5
APC Gain Kp:
0.8
APC Derivative Kd:
0.3
Wafer Grid Size:
5
Number of Layers:
15
4.7
Total Overlay (nm)
3.0
Wafer σ (nm)
2.5
Alignment σ (nm)
2.0
Process σ (nm)
35%
APC Improvement
3D Overlay Magnitude Map
Error Budget Tree
Budget Pie Chart
APC Convergence
Wafer Grid Overlay Map
Sampling Strategy
Multi-Layer Budget
Overlay Cpk Analysis
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