Reticle Pellicle Analysis

Particle Protection & Thermal Effects

96%
Transmission
85 μm
Particle Blur
98%
Contrast Ratio
45 nm
Pellicle Sag
Key Physics Equations:
Particle Blur: blur_wafer = M × blur_pellicle × (1 + h/f)
Transmission: T × exp(-α·d)
Contrast Loss: C_pellicle / C_no_pellicle
Sag: w = (qL⁴)/(384D)
Phase Shift: Δφ = 2πΔn·d/λ

Pellicle Parameters

Pellicle Height (mm)8
Particle Size (μm)10
Transmission (%)96
Thermal Load (W/cm²)5
Pressure Diff (Pa)5
Birefringence (nm)5
Defocus from Sag (nm)50
NA0.40

1. Particle Image Blur vs Height

2. Transmission Spectrum

3. Thermal Gradient Map

4. Pellicle Sag Profile

5. Contrast Loss vs Particle Size

6. Particle Detection POD

7. Birefringence Phase Error

3D Pellicle & Particle Projection