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PSM Simulation
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Phase Shift Mask
Attenuated PSM, alternating PSM, destructive interference enhancement
180°
Phase Shift
6%
Transmission
92%
Contrast
3.2
NILS
PSM Parameters
Phase Shift (°)
0
180
Transmission (%)
1
6
PSM Type
Att-PSM
Att-PSM
Pitch (nm)
40
80
CD Target (nm)
20
40
NA
0.7
1.0
Sigma
0.3
0.6
Defocus (nm)
-100
0
E_total = E_0° + t·exp(iφ)·E_180°
Contrast = (I_max - I_min)/(I_max + I_min)
Phase: φ = 2π(n-1)d/λ = 180°
Aerial Image with PSM
Phase Map
Contrast vs Phase
Electric Field Components
NILS Enhancement
Defocus Sensitivity
Phase Conflict Map