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RET Techniques
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Resolution Enhancement
32 nm
Resolution
180 nm
DOF
2.8
NILS
Quad
Illumination
RET Parameters
Illumination Mode
Conv
Quad
Sigma Outer
0.6
0.85
Sigma Inner
0
0.5
Polarization
0%
85%
NA
0.7
1.2
Pitch (nm)
50
90
Azimuth (°)
0
45
Source Points
4
4
Source Shape
Aerial Image
Polarization Effect
NILS Enhancement
DOF vs Mode
Contrast Map
SMO Result