Partial Coherence Lab

Explore NA/Illumination Effects and Pupil Cut-off with Interactive Parameter Adjustment

Interactive Partial Coherence Analysis

Lc = λ² / (2π × Δλ) × (1 - σ²)

Where λ is wavelength, Δλ is spectral width, and σ is coherence factor

Numerical Aperture (NA) 0.85

Coherence Factor (σ) 0.3

Wavelength (nm) 193 nm

Spectral Width (nm) 0.5 nm

Pupil Cut-off 0.9

Illumination Type

Coherence Length (μm)

Contrast

Resolution (nm)

Depth of Focus (μm)