Monte Carlo vs Double Gaussian Simulation Suite
Complete simulator comparing aerial image energy deposition predicted by Double-Gaussian PSF (FFT convolution) against Monte Carlo particle model. Features partial coherence knobs, flare modeling, swing curves, and comprehensive analysis with polished PDF report generation.
Explore DUV Lithography Simulation Through Advanced Tools
Interactive particle-based energy deposition simulation with real-time visualization, statistical analysis, and uncertainty quantification.
Live SimulationFFT-based convolution with double Gaussian point spread function, partial coherence effects, and aerial image calculation.
Interactive ToolExplore NA/illumination effects, pupil cut-off, and coherence length with interactive parameter adjustment.
Virtual LabThird Gaussian long-tail flare effects with interactive flare level and sigma parameter control.
3D VisualizationDuty cycle and pitch analysis with contrast/NILS calculations and swing curve visualization.
Analysis ToolSide-by-side comparison of Monte Carlo vs Double Gaussian models with statistical validation and performance metrics.
Comparison ToolParticle-Based Energy Deposition Modeling
FFT-Based Convolution with Analytical Point Spread Function
NA/Illumination Effects and Pupil Cut-off Analysis
Third Gaussian Long-Tail Effects and Scattered Light
Duty Cycle and Pitch Dependence with Contrast/NILS Calculations
Swing curves vs duty cycle with contrast and NILS calculations.
Interactive DemoContrast and NILS vs pitch analysis for lithography optimization.
Complete Technical Documentation and Implementation Guides
Complete Python API documentation with examples and integration guides.
Technical DocsStep-by-step tutorials for Monte Carlo setup, PSF modeling, and analysis.
LearningPython code examples and Jupyter notebooks for quick implementation.
CodePublished research papers and technical publications on DUV lithography.
Research