Swing Curves Analyzer

Duty Cycle and Pitch Dependence with Contrast/NILS Calculations

Interactive Swing Curves Analysis

Contrast = (I_max - I_min) / (I_max + I_min)
NILS = (I_max - I_min) / (I_max + I_min) × (2π/p) × (1/NA)

Where I_max/min are maximum/minimum intensities, p is pitch, and NA is numerical aperture

Wavelength (nm) 193 nm

Numerical Aperture 0.85

Coherence Factor (σ) 0.3

Resist Thickness (nm) 200 nm

Refractive Index 1.7

Analysis Type

Max Contrast

Max NILS

Optimal Pitch (nm)

Swing Amplitude