Etching Cost Calculator

Comprehensive total cost of ownership (TCO) analysis for etching processes. Calculate gas consumption, equipment depreciation, chamber cleaning, preventive maintenance, utilities, and throughput. Analyze cost per wafer, annual operating costs, and 5-year projections.

Cost Inputs

Enter your process parameters and costs to calculate total cost of ownership.

Process Parameters

Process Time per Wafer (min)

Wafers Processed per Year

Batch Size (wafers)

Gas Consumption & Costs

CF₄ Flow (sccm)

CF₄ Cost ($/L)

SF₆ Flow (sccm)

SF₆ Cost ($/L)

O₂ Flow (sccm)

O₂ Cost ($/L)

Ar Flow (sccm)

Ar Cost ($/L)

Equipment & Facilities

Equipment Purchase Price ($)

Depreciation Period (years)

RF Power (W)

Electricity Cost ($/kWh)

Maintenance & Cleaning

Chamber Cleaning Frequency (wafers)

Cost per Cleaning ($)

PM Frequency (hours)

PM Cost per Event ($)

Etching Cost Calculator

Cost Inputs

Process Parameters

Gas Consumption & Costs

Equipment & Facilities

Maintenance & Cleaning

Cost Analysis Results

Detailed Cost Breakdown

Cost Breakdown by Category

Annual Gas Costs

5-Year Cost Projection

Sensitivity to Throughput

Break-Even Analysis

Cost per Process Step