Etching Data Analyzer

Comprehensive statistical process control (SPC) analysis for etching data. Upload CSV data to perform time series analysis, calculate process capability (Cpk), detect trends and anomalies, analyze correlations, and generate detailed reports.

Upload Process Data

Upload a CSV file with columns: timestamp, etch_rate, cd, uniformity, pressure, power, flow, temperature. Sample data will be generated if no file is uploaded.

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Drag & Drop CSV File Here

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Analyzing data...

Etching Data Analyzer

Upload Process Data

Drag & Drop CSV File Here

Analysis Configuration

Statistical Summary

Process Capability Analysis

Anomaly Detection Results

Time Series - Etch Rate

Statistical Process Control (SPC) Chart

Etch Rate Distribution

CD Distribution

Box Plot - Process Parameters

Scatter Matrix - Parameter Relationships

Correlation Heatmap

Trend Analysis with Linear Regression

Anomaly Highlighting

Process Capability Analysis

Run Chart - Sequential Analysis