Four-Point Probe Measurement

Sheet resistance and resistivity characterization

Collinear Probe
Square Array
Wafer Mapping
Correction Factors

Measurement Parameters

Probe Configuration

I+ V+ V- I- s s s

Collinear four-point probe with equal spacing

Results

250.0
Sheet Resistance (Ω/□)
0.0131
Resistivity (Ω·cm)
76.3
Conductivity (S/cm)
4.532
Correction Factor

I-V Linearity Check

Square Array Configuration

Square Probe Layout

1 2 3 4

Square array for van der Pauw measurement

Van der Pauw Results

185.2
Rs (Ω/□)
5.50
RA (Ω)
3.20
RB (Ω)
0.92
Symmetry Factor

Sheet Resistance Map

Rs Distribution

Histogram

Statistics

250.5
Mean (Ω/□)
5.2
Std Dev
238
Min
265
Max
2.1
Uniformity (%)

Geometric Correction Factors

Sample Geometry Condition Correction Factor Formula
Semi-infinite bulk t >> s 1.000 ρ = 2πs × V/I
Thin film t << s 4.532 Rs = π/ln(2) × V/I
Circular sample d/s = 10 4.171 Apply F(d/s) correction
Circular sample d/s = 20 4.454 Apply F(d/s) correction
Circular sample d/s = 40 4.508 Apply F(d/s) correction
Rectangular L/W = 2, center 4.47 Depends on position
Edge proximity d_edge < 4s Variable Requires edge correction

Thickness Correction Factor