Semiconductor Process Equipment Characterization, Testing & Research Analysis Laboratory
Independent project, in active development. A semiconductor characterization and manufacturing execution platform combining a Python/FastAPI backend with a Next.js 14 frontend, PostgreSQL persistence, and a Celery + Redis async layer. Covers metrology (electrical, optical, structural, chemical), process control (CVD, PVD, CMP, Diffusion, Oxidation, Ion Implant, RTP), SPC with Western Electric rules, ML and virtual metrology, and a LIMS/ELN with role-based access. Core architecture in place from Sessions 1 to 17; currently in structural cleanup and finishing work.
Browse the codebase, build plan, and per-session implementation notes. Clone and run locally with
Docker via make smoke-test-build.
See docs/BUILD_PLAN.md
for the phased path from current state to production.
Comprehensive Electrical Analysis Suite
Current-voltage characterization for diodes, transistors, and solar cells with automatic parameter extraction and curve fitting.
Interactive DemoCarrier concentration, mobility, and resistivity measurements using Van der Pauw and Hall bar configurations.
Interactive DemoCapacitance-voltage profiling for doping concentration, interface trap density, and oxide thickness analysis.
Interactive DemoSheet resistance and resistivity measurements with automatic correction factors for various sample geometries.
Interactive DemoAdvanced Spectroscopic Techniques
Transmission, reflection, and absorption measurements from 190nm to 3300nm for bandgap and optical property analysis.
Interactive DemoFourier Transform Infrared spectroscopy for chemical bond identification and thin film composition analysis.
Interactive DemoThin film thickness and optical constants measurement with multi-layer modeling capabilities.
Interactive DemoPL spectroscopy for bandgap determination, defect analysis, and quantum efficiency measurements.
Interactive DemoMicroscopy and Diffraction Techniques
Crystal structure analysis, phase identification, and lattice parameter determination with Rietveld refinement.
Interactive DemoScanning electron microscopy for surface morphology, cross-section imaging, and EDS elemental mapping.
Interactive DemoAtomic force microscopy for surface topography, roughness analysis, and nanoscale feature measurement.
Interactive DemoTransmission electron microscopy for atomic-resolution imaging and electron diffraction analysis.
Interactive DemoSurface and Bulk Composition Analysis
X-ray photoelectron spectroscopy for surface chemical composition and oxidation state analysis.
Secondary ion mass spectrometry for depth profiling and trace element detection at ppb levels.
X-ray fluorescence for rapid elemental analysis and thin film composition measurement.
Molecular vibration analysis for stress measurement and material phase identification.
Seven process control areas, each with an engineering Process Control UI and a production MES dashboard
| Area | Process Type | Coverage |
|---|---|---|
| CVD | Chemical Vapor Deposition | LPCVD, PECVD, MOCVD, AACVD process modes |
| PVD | Physical Vapor Deposition | Sputter, evaporation, pulsed laser deposition |
| CMP | Chemical-Mechanical Polishing | Polishing parameter control and endpoint coverage |
| Diffusion | Thermal Diffusion | B, P, As, Sb dopants; drive-in and pre-deposition |
| Oxidation | Thermal Oxidation | Dry/wet oxidation, temperature profiling, thickness control |
| Ion Implantation | Ion Implant | Dose, energy, and channeling control |
| RTP | Rapid Thermal Processing | Annealing, silicidation, spike anneal profiles |
Thermal oxidation control with Deal-Grove model predictions, temperature profiling, and real-time thickness monitoring.
Interactive DemoChemical vapor deposition with 4 process modes, gas flow control, and in-situ film thickness monitoring.
Interactive DemoStatistical Process Control with control charts, Western Electric rules, Cpk/Ppk analysis, and drift detection.
Interactive DemoML-powered process prediction with SHAP/LIME explainability, anomaly detection, and time series forecasting.
Interactive DemoLIMS & Electronic Lab Notebook
Complete chain of custody, barcode/QR tracking, and sample lifecycle management.
E-signatures, version control, and 21 CFR Part 11 compliant documentation.
Export to CSV, Excel, JSON, and integration with analysis software.
Customizable report templates with charts, statistics, and compliance documentation.
Modern Full-Stack Implementation
React 18 with TypeScript, shadcn/ui components, and real-time WebSocket updates.
Python 3.11+ REST API with async support, Celery task queue, and Redis broker.
Persistence layer with Alembic migrations and SQLAlchemy models in the shared services package.
Local stack via Docker Compose and a Kustomize base + production overlay for Kubernetes (Helm chart in Phase 9).