Raman Spectroscopy
Non-destructive vibrational spectroscopy for crystallinity analysis, stress measurement, and phase identification in semiconductor materials.
Sample Configuration
Peak Assignments
520 cm⁻¹: LO-TO phonon (c-Si)
480 cm⁻¹: TO-like (a-Si)
300 cm⁻¹: 2TA overtone
Stress Analysis
Stress Calculation
σ = -Δω × K
K (biaxial) = 250 MPa/cm⁻¹
K (uniaxial) = 435 MPa/cm⁻¹
2D Material Analysis
| Mode | Position | Intensity |
|---|---|---|
| G | 1582 cm⁻¹ | Strong |
| 2D | 2680 cm⁻¹ | Strong |
| D | 1350 cm⁻¹ | Weak |
Mapping Setup
Map Statistics
Mean: 520.3 cm⁻¹
Std Dev: 0.15 cm⁻¹
Range: 0.8 cm⁻¹
Points: 2500