Raman Spectroscopy

Non-destructive vibrational spectroscopy for crystallinity analysis, stress measurement, and phase identification in semiconductor materials.

Sample Configuration

5.0 mW
10 s
50 nm

Peak Assignments

520 cm⁻¹: LO-TO phonon (c-Si)
480 cm⁻¹: TO-like (a-Si)
300 cm⁻¹: 2TA overtone

Raman Spectrum
520.5
Peak (cm⁻¹)
4.2
FWHM (cm⁻¹)
98%
Crystallinity
Excellent
Crystal Quality

Stress Analysis

0 MPa

Stress Calculation

σ = -Δω × K
K (biaxial) = 250 MPa/cm⁻¹
K (uniaxial) = 435 MPa/cm⁻¹

Stress-Induced Peak Shift
520.5
Peak (cm⁻¹)
0.0
Shift (cm⁻¹)
0
Stress (MPa)
0.000%
Strain

2D Material Analysis

1
Mode Position Intensity
G1582 cm⁻¹Strong
2D2680 cm⁻¹Strong
D1350 cm⁻¹Weak
2D Material Raman Spectrum
1.0
I(2D)/I(G)
0.05
I(D)/I(G)
High
Quality
1
Layers

Mapping Setup

Map Statistics

Mean: 520.3 cm⁻¹
Std Dev: 0.15 cm⁻¹
Range: 0.8 cm⁻¹
Points: 2500

Raman Map
520.3
Mean
0.15
Std Dev
±0.03%
Uniformity
2500
Points