Optical Thin-Film Metrology System

Complete Research Suite for Spectral Reflectometry & Thickness Analysis

Python-based reflectometry tool demonstrating advanced spectral interference analysis for thin-film thickness extraction

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Interactive Demonstrations

Tutorials & Documentation

Research & Documentation

Key Features

Physics Engine

  • Transfer matrix method (2×2 formalism)
  • Fresnel coefficients & phase accumulation
  • Complex refractive indices (n̂ = n + ik)
  • Multi-layer film stacks
  • Angular dependence support

Analysis Algorithms

  • FFT-based fringe analysis
  • Levenberg-Marquardt fitting
  • Differential evolution (global optimization)
  • Two-stage hybrid fitting
  • Uncertainty quantification

Material Library

  • Cauchy dispersion model
  • Sellmeier formula support
  • SiO₂, Si₃N₄, TiO₂, Al₂O₃
  • Ta₂O₅, HfO₂, and more
  • Custom material definition

Spatial Mapping

  • Motorized XY stage simulation
  • Multiple scan patterns (raster, snake, spiral)
  • 2D thickness maps with interpolation
  • 3D surface visualization
  • Real-time acquisition simulation

Visualization

  • Interactive Plotly.js charts
  • Matplotlib-based publication figures
  • Spectral interference patterns
  • FFT power spectra
  • Heatmaps and contour plots

Web Interface

  • Flask REST API backend
  • 6 API endpoints
  • JSON request/response
  • Base64 image encoding
  • Async JavaScript frontend

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Project Overview

About This Research Tool

This comprehensive Python-based reflectometry system demonstrates how thin-film thickness can be extracted from spectral interference data using advanced optical analysis techniques. The tool implements a simplified version of algorithms used in commercial systems like KLA's SpectraFilm, featuring transfer matrix calculations, FFT-based fringe analysis, and sophisticated fitting algorithms.

The system interfaces simulated spectrometer measurements with motorized XY stage control, enabling real-time 2D/3D thickness mapping visualization. This research tool was developed to demonstrate the feasibility of automated thin-film characterization in research environments, providing an educational platform for understanding optical metrology principles.

Technologies: Python (NumPy, SciPy, Matplotlib), Flask, JavaScript (Plotly.js), Transfer Matrix Method, FFT Analysis, Levenberg-Marquardt Optimization, Differential Evolution